書誌事項
- タイトル別名
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- Inner Structure and Elastic Modulus of Micro Cantilever Fabricated Using Micro-Stereolithography
- マイクロ ヒカリ ゾウケイホウ デ サクセイシタ ビショウ コウゾウブツ ノ ナイブ コウゾウ ト タテ ダンセイ ケイスウ
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抄録
It is important to know mechanical properties of micro structures fabricated as a micro machine component by micro-stereolithgraphy (μSL). In the previous study, we reported that elastic modulus of micro cantilevers fabricated by μSL is controlled by irradiation laser power and postcure processing time. In this study, we investigate the correlation between the irradiation laser power and the inner structure of the micro cantilever, which consists of periodic density distribution caused by laser scanning. The structure inside the micro cantilever made under the condition of various fabrication conditions is observed using a digital microscope and a polarizing microscope. Results show that the density of periodic inner structure has an affect on the elastic modulus of the microstructure.
収録刊行物
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- 実験力学
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実験力学 7 (3), 277-281, 2007
日本実験力学会
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詳細情報 詳細情報について
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- CRID
- 1390282680165129728
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- NII論文ID
- 10019954432
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- NII書誌ID
- AA11822914
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- ISSN
- 18844219
- 13464930
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- NDL書誌ID
- 8970627
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可