A linear model based noise evaluation of a capacitive servo-accelerometer fabricated by MEMS

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  • Yoshida Yusaku
    Device Technology Development Department, Kawasaki Research and Development Center, Mitutoyo Corporation Graduate School of Environmental Studies, Tohoku University
  • Kakuma Hideaki
    Device Technology Development Department, Kawasaki Research and Development Center, Mitutoyo Corporation
  • Asanuma Hiroshi
    Graduate School of Environmental Studies, Tohoku University
  • Niitsuma Hiroaki
    Graduate School of Environmental Studies, Tohoku University

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説明

The noise characterization of a capacitive servo-accelerometer using a linear model is presented in this paper. The input reference noise of electronic circuit is expressed as a capacitive variation and it is introduced to a linear model for frequency response, separately with the thermal mechanical noise. The simulated noise was generally found to conform to the measured noise in the experiment, suggesting that the model can be effectively used for noise evaluation of accelerometers fabricated in a similar fashion.

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