Correlation between Gas Sensing Properties and Preferential Orientations of Sputtered Tin Oxide Films

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  • RYU Jae-Sang
    Department of Electrical Engineering, Nagaoka University of Technology
  • WATANABE Yuichi
    Department of Electrical Engineering, Nagaoka University of Technology
  • TAKATA Masasuke
    Department of Electrical Engineering, Nagaoka University of Technology

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  • 酸化スズスパッタ薄膜におけるガス感度特性と粒子配向性の相関性
  • サンカ スズ スパッタ ハクマク ニ オケル ガス カンド トクセイ ト リュ

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Abstract

Investigations on preferential orientation of tin oxide films were carried out under various conditions of film fabrication from the view point of the effect on sensing mechanism. The preferential orientation of (110) crystallographic plane resulted in the increase of sensitivity for H2 gas. The observed relationship between the sensitivity and preferential orientation has been understood by considering the maximum atomic density on the (110) plane, which ensures the large numbers of adsorption sites for atomospheric gas as well as of direct reaction sites for H2 gas.

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