書誌事項
- タイトル別名
-
- Preparation of Stabilizing Solution for PZT Film by CSD-Method
- CSDホウ ニ ヨル PZT ハクマク サクセイ ノ タメ ノ アンテイ ヨウエキ ノ チョウセイ
この論文をさがす
抄録
We attempted to manufacture long life span stabilizing solution for obtain PZT precursor and/or filmy lead zirconate titanate, Pbx(ZryTi1-y)O3. The precursor solutions were synthesized by using the original solution of Pb-acetate, Ti- and Zr-alkoxide and four kinds of stabilizers, DBU, 2-ethylhexanoic acid, ammonia and acetic acid. The DBU contained precursor solution is mostly stable compared with that of the solutions contained other stabilizers, and its DBU contained solution can stand for at least over one year. Thick PZT film of (100) orientation with 0.22 μm thickness was made on PTO/Pt/SiO2/Si substrate by using CSD-method from DBU contained precursor solution. For this film, the estimated electrical resistivity was 6.2×1010 Ω•cm, the dielectric constant of 1300 and the residual polarity, Pr, of 21.1 μC/cm2.<br>
収録刊行物
-
- Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌)
-
Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌) 113 (1322), 658-662, 2005
公益社団法人 日本セラミックス協会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390282680254338304
-
- NII論文ID
- 110002292402
-
- NII書誌ID
- AN10040326
-
- ISSN
- 18821022
- 09145400
-
- NDL書誌ID
- 7685357
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可
