Thickness Dependence of Sensitivity of SnO<sub>2</sub> Film Gas Sensors
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- KANAMORI Masaaki
- First Research Dept., Research & Development Div., NOK Corporation
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- OKAMOTO Yoshiki
- Department of Chemistry, Faculty of Engineering, Cifu University
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- OHYA Yutaka
- Department of Chemistry, Faculty of Engineering, Cifu University
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- TAKAHASHI Yasutaka
- Department of Chemistry, Faculty of Engineering, Cifu University
Bibliographic Information
- Other Title
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- 酸化スズ薄膜ガスセンサーのガス感度の膜厚依存性
- サンカ スズ ハクマク ガス センサー ノ ガス カンド ノ マクアツ イゾン
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Abstract
Sensitivity of SnO2 thin-film gas sensors which were fabricated by the dip-coating method was found to exponentially increase with the decrease in film thickness. This could be ascribed to the substantial increase in the resistivity of the films in air with the decrease in the film thickness, accompanied by the decrease in the size of SnO2 crystallites.
Journal
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- Journal of the Ceramic Society of Japan
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Journal of the Ceramic Society of Japan 103 (1194), 113-116, 1995
The Ceramic Society of Japan
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Details 詳細情報について
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- CRID
- 1390282680254533376
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- NII Article ID
- 110002291070
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- NII Book ID
- AN10040326
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- ISSN
- 18821022
- 09145400
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- NDL BIB ID
- 3593573
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed
