ゾル-ゲル法由来 ZrO<sub>2</sub> の新熱炭素還元法による ZrN 薄膜の合成

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  • Synthesis of ZrN Thin Film by a New Carbothermal Nitridation Method of Sol-Gel Derived ZrO2

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ZrO2 gel film was prepared by spin-coating of Zr sol from Zr-n-propoxide, n-propanol, acetylacetone, water and nitric acid, on various substrates such as polycrystalline Al2O3, and single crystals of Al2O3, SrTiO3, 8 mol% Y2O3 doped ZrO2 (YSZ) and MgO. The dried-gel film on Al2O3 substrate was transformed to cubic ZrN single phase with bright gold-color by a new carbothermal nitridation method, in which the thin film was covered with a porous graphite crucible to realize a strong reducing atmosphere was fired in flowing nitrogen gas at a fairly high temperatures above 1673 K. The ZrN thin film thus obtained was characterized by means of X-ray diffractometry (XRD), scanning electron microscopy (SEM) observation, reflection spectra.<br>

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