A Practical Method for Compensating Surface Inclination Effect on Optical Stylus Profile Measurement
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- FUKATSU Hiroya
- 東京都立工業高等専門学校
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- MISU Kiyotaka
- 日揮株式会社
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- YANAGI Kazuhisa
- 長岡技術科学大学
Bibliographic Information
- Other Title
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- 光触針式輪郭測定における傾斜測定誤差の補正法
- ヒカリショクシンシキ リンカク ソクテイ ニ オケル ケイシャ ソクテイ ゴサ ノ ホセイホウ
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Abstract
Most optical stylus sensors composed of laser diode as a light source and objective lens are troubled with signal noise when being traversed over machined engineering surfaces. Its main causes are irregularity and asymmetry of reflected light intensity distribution due to speckle noise inevitably included in the reflected light and geometrical inclination of sample surface. The optical compensation method of reducing the speckle noise was developed in the previous report. This paper describes the effect of sample surface inclination on the detected displacement signal and reveals that such component can be corrected by using the same optical system as the speckle noise reduction system. Experimental verification of the total error compensation propriety is also presented.
Journal
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- Journal of the Japan Society for Precision Engineering, Contributed Papers
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Journal of the Japan Society for Precision Engineering, Contributed Papers 71 (5), 590-594, 2005
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390282680257145472
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- NII Article ID
- 10015529669
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- NII Book ID
- AA11966630
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- ISSN
- 18818722
- 13488716
- 13488724
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- NDL BIB ID
- 7350481
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed