書誌事項
- タイトル別名
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- FIB Etching of Glass-Like Carbon Die and Mold Press of Micro Glass Lens
- ガラスジョウ タンソ セイケイガタ ノ FIB カコウ ト マイクロガラスレンズ ノ モールド セイケイ
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説明
To produce micro glass lens by mold-press, 3D micro lens die was fabricated on glass-like carbon (GC) by focused ion beam (FIB) etching. The dimensional accuracy and surface roughness, as well as transcriptional performance, were investigated. A precise and smooth die was completed by optimizing dwell time, current and step number of 2D bit map data, which agreed well with theoretical estimation. Micro glass lenses with different diameter and gradient angle were mold-pressed using the GC die. The diameter and sag were confirmed to be nearly equivalent to or just smaller than those of GC die.
収録刊行物
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- 精密工学会誌論文集
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精密工学会誌論文集 72 (6), 735-739, 2006
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282680258578560
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- NII論文ID
- 110004729625
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- NII書誌ID
- AA11966630
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- ISSN
- 18818722
- 13488716
- 13488724
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- NDL書誌ID
- 7984300
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- データソース種別
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- JaLC
- NDL
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- 使用不可