書誌事項
- タイトル別名
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- Transparent Conducting Titanium-Doped Zinc Oxide Films Deposited on Organic Substrates
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説明
Approximately 500 nm-thick transparent conducting films applicable to the whole solar spectrum have been prepared on flexible cyclo-orephin polymer (COP) substrates by irradiating the pulsed laserbeam of an ArF excimer laser (λ=193 nm, laser energy of 80 mJ, repetition rate of 10 Hz) on the titanium-doped zinc oxide (TZO : 1 wt.% Ti2O3) target. The deposition cell was initially evacuated to ∼10−4 Pa and then, film deposition was performed at oxygen partial pressure of 0.5 Pa, oxygen flow rate of 15 sccm and substrate temperature of 150℃. As a result, the lowest resistivity of 2.9×10−4 Ω•cm（μ=42 cm2/V•s, n=5.2×1020 cm−3) and sheet resistance of 5.7 Ω/sq were obtained. The values of average transmittance spectra were 84% in the visible wavelength region (400-700 nm) and 79% in the whole solar spectra (400-1500 nm), respectively.<br>
収録刊行物
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- Ｊｏｕｒｎａｌ ｏｆ ｔｈｅ Ｖａｃｕｕｍ Ｓｏｃｉｅｔｙ ｏｆ Ｊａｐａｎ
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Ｊｏｕｒｎａｌ ｏｆ ｔｈｅ Ｖａｃｕｕｍ Ｓｏｃｉｅｔｙ ｏｆ Ｊａｐａｎ 55 (10), 454-455, 2012
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282680270473216
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- NII論文ID
- 10031122234
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- NII書誌ID
- AN00119871
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- BIBCODE
- 2012JVSJ...55..454K
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- COI
- 1:CAS:528:DC%2BC38XhvFShsrfE
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- ISSN
- 18824749
- 18822398
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
