Introduction for AlTiN Films with High Emissivity and Low Outgassing Rate in Vacuum and these Fabrication Processes
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- SATO Masaru
- Department of Sals Group of TIGOLD CORPORATION
Bibliographic Information
- Other Title
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- 低ガス放出で高輻射率の AlTiN 成膜の紹介
- テイガス ホウシュツ デ コウ輻シャリツ ノ AlTiNセイマク ノ ショウカイ
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Journal
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 56 (6), 237-240, 2013
The Vacuum Society of Japan
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Details 詳細情報について
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- CRID
- 1390282680272305792
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- NII Article ID
- 10031177174
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- NII Book ID
- AA12298652
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- BIBCODE
- 2013JVSJ...56..237S
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- ISSN
- 18824749
- 18822398
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- NDL BIB ID
- 024691767
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
