The 13th International Symposium on Sputtering and Plasma Processes (ISSP2015)
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- KATO Kazuhiro
- Chair, ISSP2015 Executive Committee Glass Research Center, Central Glass Co., Ltd.
Journal
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 58 (12), 452-453, 2015
The Vacuum Society of Japan
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Details 詳細情報について
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- CRID
- 1390282680272557824
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- NII Article ID
- 130005117580
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- ISSN
- 18824749
- 18822398
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles