High-concentration Rare Earth Ion Doping to Si Using Reconstructed Surface Structure

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  • MIYATA Yusuke
    Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University
  • OKUYAMA Yoshitaka
    Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University
  • FUJIMURA Norifumi
    Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University

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Other Title
  • 表面再構成構造を利用したSiへの希土類元素の高濃度ドーピング
  • ヒョウメン サイコウセイ コウゾウ オ リヨウ シタ Si エ ノ キドルイ ゲンソ ノ コウノウド ドーピング

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Journal

  • Journal of Smart Processing

    Journal of Smart Processing 2 (5), 219-223, 2013-09-20

    Smart Processing Society for Materials, Environment & Energy (High Temperature Society of Japan)

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