Fabrication of micro lens array by staining methood

Bibliographic Information

Other Title
  • ステイン法によるマイクロレンズアレイ作製技術

Description

We propose a new method for fabrication of microlens arrays in which stain dots of a size 90-200 m in diameter are arrayed with 150-300m pitch on soda-lime or borosilicate glass substrates and then the substrates are heat-treated. Interference patterns were observed by a He-Ne laser radiation showing that the refractive index was modified corresponding to the arrayed dots and suggesting that the microlens arrays were formed.

Journal

Details 詳細情報について

  • CRID
    1390282680593119104
  • NII Article ID
    130006973827
  • DOI
    10.14853/pcersj.2006s.0.571.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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