High Speed Positioning for Pneumatic System

DOI

Bibliographic Information

Other Title
  • 空圧位置決め制御系の高速化

Description

In the field of positioning control,magnetic actuators such as linear motors have been widely used. However it can not be used by electron beam exposure devices due to the magnetic leak and heat generation. Therefore,positioning control with air pressure actuators was suggested instead of magnetic actuators. This problem is inactive response with air's compressibility. Therefore,this paper shows the positioning control methods of PDD2 control when servo valve including air system is imperfection integrator and speeding of positioning control with perfect 2 degrees-of-freedom control.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390282680624207616
  • NII Article ID
    130005025084
  • DOI
    10.11511/jacc.51.0.202.0
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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