Improvement of Atmospheric Compensator to Reduce the Laser Measurement Error for Ultra-Precision Machine Tools

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Other Title
  • 超精密加工機におけるレーザ測長誤差低減のための環境補正装置の高精度化

Description

Atmospheric compensator to reduce the laser measurement error caused by change in the refractive index of air has been produced and applied to the ultra–precision machine tool, and the position measurement error of the machine tool is actually reduced. In this study, the initial length which corresponds to deadpath length in optical path of the laser interferometer is treated to improve the performance of the compensator. The influence of the difference between the set value of initial length and the true one on measurement error is evaluated. The positioning accuracy of the machine tool has been improved by introducing the optimal value of initial length estimated by experimental results to the compensator.

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Details 詳細情報について

  • CRID
    1390282680625202944
  • NII Article ID
    130004656966
  • DOI
    10.11522/pscjspe.2005a.0.429.0
  • Article Type
    journal article
  • Data Source
    • JaLC
    • CiNii Articles
    • KAKEN
  • Abstract License Flag
    Disallowed

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