Development of Ultrahigh Vacuum Compatible Telescopic Stick-Slip Actuator

DOI

Bibliographic Information

Other Title
  • 超高真空対応テレスコピック型Stick-Slipアクチュエータの開発
  • 振動解析による安定した駆動の実現

Abstract

To realize reliable operation of telescopic stick-slip actuator which the authors are developing as a fully nonmagnetic, UHV compatible, high-precision, long-stroke and extendable linear actuator, a new profile of excitation voltage to piezoelectric vibration source, which are 1st and 2nd harmonics extracted out of saw wave, was tested and successfully operated the actuator. Excitation whose harmonic resonates with actuators mechanism was tested, and similar operation speed was obtained by much smaller amplitude of excitation voltage.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390282680628284032
  • NII Article ID
    130004657787
  • DOI
    10.11522/pscjspe.2005s.0.661.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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