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Fabrication of ultraprecisely figured mirrors for hard X-ray focusing and evaluation of focusing property
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- Mimura Hidekazu
- Osaka University
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- Matsuyama Satoshi
- Osaka University
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- Yumoto Hirokatsu
- Osaka University
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- Hara Hideyuki
- Osaka University
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- Yamamura Kazuya
- Osaka University
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- Sano Yasuhisa
- Osaka University
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- Endo Katsuyoshi
- Osaka University
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- Mori Yuzo
- Osaka University
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- Ishikawa Tetsuya
- RIKEN
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- Yamauchi Kazuto
- Osaka University
Bibliographic Information
- Other Title
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- 超高精度X線集光ミラーの作製と集光特性の評価
Description
Recently, at third-generation synchrotron radiation facilities, by utilizing modern X-ray microscopy with highly brilliant and coherent X-rays, detailed investigations regarding molecular structures, chemical bonding conditions, etc. have been carried out as objects of various interesting samples including biological and medical ones. Nano-focused X-ray beams are necessary to add nanometer-level spatial analytical ability to the microscopy. X-ray focusing at Kirkpatric-Baez setup with two total reflection mirrors is a promising method from the viewpoints of high efficient and energy tunable focusing. Here we report development of ultraprecise mirror optics and realization of a nano-focused hard X-ray beam. Fabricated mirrors having 0.1 nm (RMS) level accuracy in both figure and surface roughness led to ideal diffraction limited focusing at hard X-ray regions. Focal size defined as full width at half maximum in intensity profiles were 36nm × 48nm at an X-ray energy of 15keV.
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2005S (0), 788-788, 2005
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390282680630190848
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- NII Article ID
- 130004657900
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed