Development of spectroscopic ellipsometry with dual-optical-comb spectroscopy

DOI

Bibliographic Information

Other Title
  • デュアル光コム分光法を用いた分光エリプソメトリーの開発

Description

In this report, we demonstrated a new methodology of spectroscopic ellipsometry employing dual-optical-comb spectroscopy, namely dual-optical-comb spectroscopic ellipsometry (DCSE). The DCSE provides fast ellipsometric evaluation with high-spectral accuracy and resolution, wide spectral bandwidth and without any mechanical movements for both the polarization analysis and spectral decoding, which has a big leap in performance of spectroscopic ellipsometry. We performed the DCSE evaluation of birefringent materials and thin films with the spectral accuracy and resolution up to 1.2x10^-5 nm (1.5 MHz) over 5-10 THz spectral bandwidth.

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Keywords

Details 詳細情報について

  • CRID
    1390282680634619136
  • NII Article ID
    130006434610
  • DOI
    10.11522/pscjspe.2017a.0_981
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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