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- ISHII Junzo
- Okayama University
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- YANASE Shinichiro
- Okayama University
Bibliographic Information
- Other Title
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- 1511 半導体洗浄装置最適設計の最新モデルの流れ計算(流体力学VIII)
Journal
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- The Proceedings of Conference of Chugoku-Shikoku Branch
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The Proceedings of Conference of Chugoku-Shikoku Branch 2010.48 (0), 481-482, 2010
The Japan Society of Mechanical Engineers
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Details 詳細情報について
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- CRID
- 1390282680838547584
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- NII Article ID
- 110008744650
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- ISSN
- 24242764
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
- OpenAIRE
