1003 Polishing Characteristics of Difficult-to-machine Materials Under Various Gas Conditions Controlled by High Pressure Chamber Type CMP Machine : Evaluation of Polishing Characteristics Using Elemental Analysis
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- EGASHIRA Takateru
- Kyushu University
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- KUROKAWA Syuuhei
- Kyushu University
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- DOI Toshirou
- Kyushu University
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- Ohnishi Osamu
- University of Miyazaki
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- UNEDA Michio
- Kanazawa Institute of Technology
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- KOSHIYAMA Isamu
- The Koshiyama Science and Technology Foundation
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- ICHIKAWA Daizo
- Fujikoshi Machinery Corp.
Bibliographic Information
- Other Title
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- 1003 耐圧密閉チャンバー型CMP装置による加工雰囲気制御下での難加工材料の加工特性 : 元素分析による研磨特性の評価(生産加工・工作機械1)
Journal
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- The Proceedings of Conference of Kyushu Branch
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The Proceedings of Conference of Kyushu Branch 2013.66 (0), 319-320, 2013
The Japan Society of Mechanical Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390282680843299840
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- NII Article ID
- 110009961617
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- ISSN
- 24242780
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles