C022 Magnetic Attraction Force-preloaded Aerostatic Guideway for High Speed Nano Positioning System

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  • TSUMURA Takumi
    Department of Mechano-Micro Engineering, Tokyo Institute of Technology
  • YOSHIOKA Hayato
    Precision and Intelligence Laboratory, Tokyo Institute of Technology
  • SHINNO Hidenori
    Precision and Intelligence Laboratory, Tokyo Institute of Technology
  • SAWANO Hiroshi
    Precision and Intelligence Laboratory, Tokyo Institute of Technology

説明

Demands for a nanometer positioning with high resolution and long stroke have increased in a variety of industries. This paper presents a magnetic attraction force-preloaded aerostatic guideway, which can apply to high speed nanometer positioning system. In the proposed aerostatic bearing, in order to minimize eddy current loss, magnetic attraction force adds to a structure following the positioning table. From evaluation results of characteristics of the aerostatic guideway, the magnetic attraction force-preloaded is designed so as to obtain high performance. After optimizing the magnetic force preloaded, the experimental results confirm that the proposed guideway has sub-nanometer positioning capability.

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