6-2 二重渦巻き形状のMEMS粘度センサの開発(セッション6:マイクロ物理センサ)

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タイトル別名
  • 6-2 Double Spiral Shaped Micro Viscosity Sensor(η-MEMS)

説明

A Micro viscosity sensor, named η-MEMS, has been developed. The η-MEMS is manufactured by processing technology of Micro Electro Mechanical Systems. The basic shape of the viscosity sensor is double spiral. One spiral is a vibrating body which is vibrated by a Piezo actuator and another spiral is a sensing body which is vibrated by viscous stress. The principle of the viscosity sensor is improvement of vibrating viscometer. A new testing system of the sensor chip has constructed and the principle of the viscosity measurement has been confirmed.

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