Highly Transparent Chemically Amplified ArF Excimer Laser Resists by Absorption Band Shift for 193 nm Wavelength.
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- Naito Takuya
- Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba–cho, Saiwai–ku, Kawasaki 210
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- Asakawa Koji
- Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba–cho, Saiwai–ku, Kawasaki 210
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- Shida Naomi
- Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba–cho, Saiwai–ku, Kawasaki 210
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- Ushirogouchi Tohru
- Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba–cho, Saiwai–ku, Kawasaki 210
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- Nakase Makoto
- Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, 1, Komukai Toshiba–cho, Saiwai–ku, Kawasaki 210
抄録
Naphthalene-containing chemically amplified resists for ArF excimer laser exposure are proposed, based on the concept of the absorption band shift by conjugation extension. Newly developed ArF excimer resists show a high transparency at 193 nm wavelength, a high sensitivity and a high contrast. The sensitivity of the resist is 150 mJ/cm2, which is 20 times greater than that of poly(methylmethacrylate) (PMMA). Furthermore, a 0.16 µ m pattern could be successfully fabricated by an ArF excimer laser stepper with 0.55 numerical aperture (NA) projection lens.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 33 (12B), 7028-7032, 1994
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681221953408
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- NII論文ID
- 210000036352
- 30021821541
- 130004519698
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- COI
- 1:CAS:528:DyaK2MXjt1Kqt78%3D
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- ISSN
- 13474065
- 00214922
- http://id.crossref.org/issn/13474065
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可