Morphology of Silicon Oxide Film on Silicon Wafer Surface during Its Removal Process in a Hydrogen Ambient.
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- Mayusumi Masanori
- Super Silicon Research Institute Corp., 555-1 Nakanoya, Annaka, Gunma 379-0125, Japan
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- Imai Masato
- Super Silicon Research Institute Corp., 555-1 Nakanoya, Annaka, Gunma 379-0125, Japan
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- Nakahara Shinji
- Super Silicon Research Institute Corp., 555-1 Nakanoya, Annaka, Gunma 379-0125, Japan
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- Inoue Kazutoshi
- Super Silicon Research Institute Corp., 555-1 Nakanoya, Annaka, Gunma 379-0125, Japan
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- Habuka Hitoshi
- Department of Chemical Engineering Science, Yokohama National University, 79-5 Tokiwadai, Hodogaya, Yokohama 240-8501, Japan
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抄録
In order to develop the low-temperature silicon epitaxial growth process, the change in the surface morphology of the silicon dioxide film and the silicon surface is studied in a transient state, for the first time, at 1223 K at a pressure of 40-101 kPa in a hydrogen ambient. A very smooth and clear silicon substrate surface is achieved using a uniform silicon dioxide film formed using ozonated ultrapure water and a very low flow rate of hydrogen gas. The surface morphology of the silicon substrate finally becomes smooth and the pit formation is suppressed, although the surface shows a nonuniform island appearance during the removal of the silicon dioxide film. The microroughness of the silicon substrate surface is improved by heating in a hydrogen ambient and by the silicon epitaxial film growth after complete removal of the ozone oxide film.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 40 (11), 6556-6560, 2001
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681229862656
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- NII論文ID
- 210000050260
- 110004043499
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 5986334
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可