Oxygen-Related Defects Introduced by As+-Implantation through Cap Layers in Si Probed by Monoenergetic Positron Beams.
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- Uedono Akira
- Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
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- Muramatsu Makoto
- Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
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- Ubukata Tomohiro
- Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
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- Tanino Hirotoshi
- Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
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- Tanigawa Shoichiro
- Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
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- Nakano Akihiko
- Semiconductor Technology Academic Research Center, 16-10, Shimbashi 6-chome, Minato-ku, Tokyo 105-0004, Japan
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- Yamamoto Hidekazu
- Semiconductor Technology Academic Research Center, 16-10, Shimbashi 6-chome, Minato-ku, Tokyo 105-0004, Japan
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- Suzuki Ryoichi
- Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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- Ohdaira Toshiyuki
- Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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- Mikado Tomohisa
- Semiconductor Technology Academic Research Center, 16-10, Shimbashi 6-chome, Minato-ku, Tokyo 105-0004, Japan
Bibliographic Information
- Other Title
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- Oxygen-Related Defects Introduced by As〔+〕-Implantation through Cap Layers in Si Probed by Monoenergetic Positron Beams
- Oxygen-Related Defects Introduced by As<sup>+</sup>-Implantation through Cap Layers in Si Probed by Monoenergetic Positron Beams
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Abstract
The depth distributions and species of defects in 50 keV As+-implanted Si with a cap layer (SiO2 or SiN) were determined from measurements of the Doppler broadening spectra of the annihilation radiation and the lifetime spectra of positrons. Before annealing, the main species of defects below the amorphous region was determined to be divacancies. Upon annealing at 800ºC, oxygen-related defects were introduced into the subsurface region (<20–40 nm). The species of these defects was identified as oxygen microclusters. The positrons were trapped by the open spaces adjacent to the clusters, and the size of these spaces was estimated to be close to that of monovacancies. The oxygen-related defects were annealed out after rapid thermal annealing at 1050ºC (10 s). As+-implantation through the SiN film suppressed the introduction of recoiled oxygen atoms; as a result, the concentration of the oxygen-related defects was decreased.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 39 (11), 6126-6129, 2000
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390282681230732928
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- NII Article ID
- 210000047962
- 110004055628
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL BIB ID
- 5575087
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed