Applicability of Phosphorus and Boron Diffusion Parameters Extracted from Predeposition to Drive-in Diffusion for Bulk Silicon and Silicon-on-Insulator.
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- Arai Eisuke
- Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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- Iida Daisuke
- Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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- Asai Hiroshi
- Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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- Ieki Yasushi
- Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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- Uchida Hideo
- Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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- Ichimura Masaya
- Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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Abstract
Predeposition profiles of phosphorus (P) and boron (B) in bulk Si were measured and diffusion parameters used to simulate the profiles were extracted using a simulator. The predeposition was carried out under the condition that the surface concentration reaches the solid solubility. Applying the parameters, it was examined systematically whether experimental profiles under other conditions can be successfully simulated or not. Experimental results for both P and B diffusions show that the retardation of profiles of predeposition in SOI as compared with those in bulk Si is observed at 870°C but not at 970°C, and the retardation of profiles of drive-in diffusion in SOI is observed at 870°C in O2 atmosphere but not in N2 atmosphere and not at 970°C in both atmospheres. Comparisons of experimental profiles with simulated ones show that the simulated drive-in profiles in bulk Si and SOI are shallower than the experimental profiles at both temperatures irrespective of O2 or N2 atmosphere. This discrepancy between experimental and simulated drive-in profiles suggests that some effect that enhances drive-in diffusion exists in P and B diffusion.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 42 (4A), 1503-1510, 2003
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390282681233642880
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- NII Article ID
- 130004530561
- 80015914766
- 210000053106
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL BIB ID
- 6507633
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed