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Observation of Lattice Defects in Silicon by Scanning Electron Microscopy Utilizing Beam Induced Current Generated in Schottky Barriers
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- Kawado Seiji
- SONY CORPORATION Research Center
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- Hayafuji Yoshinori
- SONY CORPORATION Research Center
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- Adachi Tohru
- SONY CORPORATION Research Center
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Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 14 (3), 407-408, 1975
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390282681244982912
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- NII Article ID
- 110003894849
- 210000017950
- 130003460470
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- NII Book ID
- AA00690800
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- ISSN
- 13474065
- 00214922
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- Text Lang
- en
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
