書誌事項
- タイトル別名
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- Development of Vibration-Driven MEMS Electret Power Generator for Energy Harvesting Application(<Special Issue>The 1st Symposium on Micro-Nano Engineering)
- 環境発電に用いるMEMS エレクトレット振動発電器の開発
- カンキョウ ハツデン ニ モチイル MEMS エレクトレット シンドウ ハツデンキ ノ カイハツ
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A vibration-driven electret generator has been developed. By using parylene as the spring material, a high-aspect-ratio spring with low-resonant-frequency is realized. Large in-plane amplitude of 0.5mm at the resonant frequency as low as 63Hz has been achieved. Aprototype generator with a seismic mass of 11.6×10.2mm^2 is fabricated through MEMS technologies. Fluorinated amorphous polymer CYTOP is used as high-perfomance polymer electret material. With the present early prototype, we have obtained output power of 1μW at the resonant frequency of 63Hz.
収録刊行物
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- 日本機械学会論文集Ｃ編
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日本機械学会論文集Ｃ編 76 (768), 1887-1889, 2010
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390282681362481920
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- NII論文ID
- 110007685227
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- NII書誌ID
- AN00187463
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- ISSN
- 18848354
- 03875024
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- NDL書誌ID
- 10810580
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可