慣性力発生装置を用いたアクティブ消振システムの開発

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  • Development of an Active Vibration Canceling System Using Intertial Force Generators

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Recently, the density of components on precision devices such as semiconductors has been increasing. As a consequence, the acceptable vibration level of floors on which manufacturing equipment is installed is becoming smaller. Conversely, the vibration that is generated by manufacturing equipment is becoming larger because the size of manufacturing object is increasing. Active vibration isolation devices have been used to isolate equipment from floor vibration. However the vibration control force generated by active vibration isolation devices causes the floor vibration when they are used to isolate the large vibrations generated by manufacturing equipment. For such a background, a new vibration canceling system using an inertial force generator is developed in this research. In addition, effectiveness of the developed canceling system is confirmed by experiment.

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