Evaluation of the Penetration Depth of Total-reflection X-rays.

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Other Title
  • 全反射Ｘ線侵入深さの評価
  • ゼン ハンシャ Xセン シンニュウ フカサ ノ ヒョウカ

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Abstract

We have studied an experimental method to evaluate the penetration depth of total-reflection x-rays, which is an important factor for total-reflection x-ray analysis. The penetration depth can be evaluated by measuring the takeoff-angle dependence of x-ray fluorescence. We have developed a new glancing-incidence and glancing-takeoff x-ray analytical apparatus. Using this apparatus, we evaluated the penetration depth of Mo Kα into a GaAs wafer. The experimental results agreed well with the theoretical penetration depth.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 18 (7), 424-428, 1997

    The Surface Science Society of Japan

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