STM and LEED Analysis of 6H-SiC(0001) Surface Reconstructions

  • ONO Takuma
    Department of Electrical Engineering, Kyushu Institute of Technology
  • NAITOH Masamichi
    Department of Electrical Engineering, Kyushu Institute of Technology
  • NISHIGAKI Satoshi
    Department of Electrical Engineering, Kyushu Institute of Technology
  • TOYAMA Naotake
    Department of Electrical Engineering, Kyushu Institute of Technology
  • SHOJI Fumiya
    Faculty of Engineering, Kyushu Kyoritsu University

Bibliographic Information

Other Title
  • 6H‐SiC(000 ̄1)表面再構成過程のSTM・LEED研究

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Abstract

We applied scanning tunneling microscopy (STM) and low-energy electron diffraction (LEED) to analyze the initial process of graphitization at 6H-SiC(000-1) surfaces. There appeared a (4×4) periodicity in the LEED pattern of the 6H-SiC(000-1) surface annealed at 1050oC. In the STM image, many protrusions with (4×4) periodicity were observed on the graphite formed on the 6H-SiC(000-1) surface.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 25 (8), 519-520, 2004

    The Surface Science Society of Japan

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