熱ＣＶＤ法による超微粒子コーティング装置を用いたＳｉＣ／Ｓｉ３Ｎ４複合粉体の作製

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  • 上宮 成之
    岐阜大学工学部機能材料工学科 成蹊大学理工学部物質生命理工学科
  • 英 敬信
    成蹊大学理工学部物質生命理工学科
  • 小島 紀徳
    成蹊大学理工学部物質生命理工学科

書誌事項

タイトル別名
  • Fabrication of SiC/Si3N4 Composite Particles by Ultrafine-Powder Coating Reactor Using Thermal CVD Technique
  • ネツ CVDホウ ニ ヨル チョウビリュウシ コーティング ソウチ オ モチイタ SiC Si3N4 フクゴウ フンタイ ノ サクセイ

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抄録

  Si3N4 fine particles covered with deposited SiC ultrafine powder, denoted as SiC/Si3N4 composites, with excellent sinterability were prepared by an ultrafine powder coating reactor using thermal CVD technique. Reactant gases used were monosilane and ethylene. The CVD reactor was designed to accelerate homogeneous nucleation reaction. The effects of reactant gas flow rate ratio, C/Si, and reaction temperature on C2H4 conversion, C content in the deposited ultrafine powder and C selectivity were investigated. The CVD conditions were optimized to form stoichiometric ultrafine powder. The XPS results of ultrafine powder predict the synthesis of stoichiometric SiC. The required conditions for the sintering of the produced SiC/Si3N4 composites were drastically milder than that for a conventional sintering process for commercial Si3N4 fine particles. The application of our CVD reactor will be expected to the preparation of various composite particles with easy sinterability.<br>

収録刊行物

  • 日本金属学会誌

    日本金属学会誌 71 (12), 1089-1093, 2007

    公益社団法人 日本金属学会

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