Development of Micro-Gas Valve Driven by Magnetic Field
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- Ogasawara Naoki
- Graduate School of Science and Technology, Hirosaki University
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- Okazaki Teiko
- Graduate School of Science and Technology, Hirosaki University
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- Saito Chihiro
- Namiki Precision Jewel, Co., Ltd.
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- Furuya Yasubumi
- Graduate School of Science and Technology, Hirosaki University
Bibliographic Information
- Other Title
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- 磁場駆動型小型マイクロガスバルブの開発
- ジバ クドウガタ コガタ マイクロガスバルブ ノ カイハツ
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Abstract
Giant magnetostrictive Fe-Pd and Fe-Ga alloys are promising as actuator/sensor materials with high respective velocity and stress created by magnetostriction. To apply them to a micro valve, we developed magnetostrictive actuators, that is, Fe80Ga20/Ni and Fe70.4Pd29.6/Ni bimorph layers. These cantilever-type actuators can be bent by applying magnetic field parallel to length. An actuator point displaced about 270 μm under a low magnetic field of 37 kAm-1. Large (20 mm×18 mm×0.2 mm) and small (17.5 mm×5 mm×0.2 mm), (10 mm×3 mm×0.2 mm) actuators were applied to a micro-gas valves. The opening and closing action of a valve consisting of magnetostrictive bimorph layers can be controlled remotely by magnetic fields. Gas flow rate can be driven from 43 to 0 ml min-1 by increasing the magnetic field to 20 kAm-1. The response time to the applied magnetic field is below 0.12 s. Moreover, the magnetostrictive actuator is excellent in durability.<br>
Journal
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- Journal of the Japan Institute of Metals and Materials
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Journal of the Japan Institute of Metals and Materials 73 (10), 759-763, 2009
The Japan Institute of Metals and Materials
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Details 詳細情報について
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- CRID
- 1390282681454448000
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- NII Article ID
- 10025559595
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- NII Book ID
- AN00187860
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- ISSN
- 18806880
- 24337501
- 00214876
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- NDL BIB ID
- 10458178
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed