Generation of Inductively Coupled Thermal Plasma with Pulse Modulated Mode
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- Sakuta Tadahiro
- Department of Electrical and Computer Engineering, Kanazawa University
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- Tanaka Yasunori
- Department of Electrical and Computer Engineering, Kanazawa University
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- Katsuki Makoto
- Department of Electrical and Computer Engineering, Kanazawa University
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- Ishigaki Takamasa
- National Institute for Research in Inorganic Materials
Bibliographic Information
- Other Title
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- パルス変調された高周波誘導熱プラズマの発生
- パルス ヘンチョウ サレタ コウシュウハ ユウドウ ネツ プラズマ ノ ハッセイ
- Generation of pulse‐modulated high‐frequency induction thermal plasma
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Abstract
We have newly designed a thermal plasma system which can be operated with a pulse modulated mode for the control of plasma power in the time domain and for creating non-equilibrium effects such as fast heating or quenching of the plasma to produce new functional materials at a high rate. The system consists of a solid state power supply with a maximum peak power of 30 kW (20 kW continuous), an induction plasma torch with a 13-turns coil of 55 mm diameter and 85 mm length and a vacuum chamber. The pulse modulated plasma was successfully produced at a plasma power of 11 kW and a pressure from 27 kPa to 101 kPa (from 200 to 760 Torr). The on and off time were each 5 ms, which corresponds to a duty factor of 50%. Measurements were carried out on the time variation of the spectral lines emitted from the ArI species. The dynamic behavior of the plasma temperature in an on-off cycle was estimated by the Boltzman plot method as an average value for eight emission lines. The excitation temperature of the ArI atom changed periodically from 5000 K to 14000 K during the cycle at 27 kPa. The magnitude of this temperature change was weakened at higher pressure of 101 kPa. The minimum duty factor to sustain the pulse modulated thermal plasma was found to be 30%, which corresponds to the pulse off time of 10 to 12 ms.
Journal
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- Journal of the Japan Institute of Metals and Materials
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Journal of the Japan Institute of Metals and Materials 63 (1), 2-8, 1999
The Japan Institute of Metals and Materials
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Details 詳細情報について
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- CRID
- 1390282681467833472
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- NII Article ID
- 10002548364
- 10008218372
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- NII Book ID
- AN00187860
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- ISSN
- 18806880
- 24337501
- 00214876
- http://id.crossref.org/issn/00214876
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- NDL BIB ID
- 4636802
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed