Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition.
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- HAYASHI Toshiyuki
- Department of Mechanical Engineering, Nagoya University
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- MATSUMURO Akihito
- Department of Micro System Engineering, Nagoya University
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- WATANABE Tomohiko
- Department of Mechanical Engineering, Nagoya University
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- MORI Toshihiko
- Department of Mechanical Engineering, Nagoya University
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- TAKAHASHI Yutaka
- Department of Mechanical Engineering, Mie University
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- YAMAGUCHI Katsumi
- Department of Mechanical Engineering, Nagoya University
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説明
Plastic deformation of TiN thin films with (111) and (200) preferred orientation was determined based on their hardness anisotropy. Hardness was measured by means of the nano-indentation technique. Plastic deformation of TiN films was caused by the indentation of the trigonal diamond tip, and evidence of this phenomenon was provided by cross-sectional scanning electron microscopy (SEM) observation and transmission electron diffraction (TED) analysis. The influence of the differences in residual stress and grain size on hardness anisotropy was restrictive, and hardness anisotropy can be explained by the anisotropy of yield stress as calculated using Schmid’s law. This relationship suggests the existence of a {100}‹110› slip system in the TiN crystal. Transmission electron microscopy (TEM) observation of brittle cracks in TiN films confirmed that these cracks are caused not cleavage fractures but by intergranular fractures.
収録刊行物
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- JSME International Journal Series A Solid Mechanics and Material Engineering
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JSME International Journal Series A Solid Mechanics and Material Engineering 44 (1), 94-99, 2001
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390282681471009920
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- NII論文ID
- 110002974684
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- NII書誌ID
- AA11179396
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- ISSN
- 13475363
- 13447912
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- HANDLE
- 10076/8517
- 2237/9037
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- NDL書誌ID
- 5634705
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- IRDB
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
