スルフィド結合を有する高分子の合成と主鎖切断型ポジ型レジストへの応用

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書誌事項

タイトル別名
  • Synthesis of the Polymers Containing Sulfide Bonds in the Main Chain and Application as Positive Type Resist
  • スルフィド ケツゴウ オ ユウスル コウブンシ ノ ゴウセイ ト シュサ セツ

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説明

Five kinds of polymers containing sulfide bonds (C-S-C) in the main chain were synthesized in water emulsion of thiirane compounds with the use of CdSi catalyst. The polymers are degradable by the irradiation of UV light, γ-ray, or electron beam, and the decrease of the molecular weight was analyzed by Gel-Permiation Chromatography. The quantum yield of the photoscission is around 0.1 and the G value of the scission is about 8 for the sulfide polymers. IR spectra of the gas evolved by the UV irradiation showed the existence of C-H and carbon-carbon double bonds. Poly (2-ethyl, 2-methyl thiirane) formed a noncrystalline film on a plate with a higher sensitivity to the electron beam than poly (methyl methacrylate) film.

収録刊行物

  • 高分子論文集

    高分子論文集 37 (4), 269-274, 1980

    公益社団法人 高分子学会

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