An Experimental Study on Control of Temperature Variations in High Precision Constant Temperature Clean Room

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  • 恒温式クリーンルームにおける精密温度制御に関する実験的研究
  • コウオンシキ クリーン ルーム ニ オケル セイミツ オンド セイギョ ニ カンスル ジッケンテキ ケンキュウ

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In the past, there was the constant temperature clean room composed of the air conditioner that used cooling water, heat wires and hot water as heat-source. However, they are not considered about the energy-saving and system running cost. We made a constant temperature clean room for a semiconductor manufacturing process, in which the room temperature is controlled every minute. This clean room system was composed of a clean room insulated from temperature variation in the outside environment and an air conditioner that used only cooling water as heat-source to control the clean room temperature. The air conditioner was composed of double cooling water circulation, a cooling coil, and a heat exchanger. Analyzed the experimental data of clean room temperature, temperature in the environment, cooling water temperature around cooling coil, and cooling water temperature around heat exchanger in the air conditioner. And we calculated spectrum of temperature variation data to estimate the energy of temperature variation, and cross-correlation function between each temperature variation data to investigate the cause of clean room temperature variation. As the result, we knew that the clean room temperature variation were significantly effected by the supply cooling water temperature variation. Furthermore, the air conditioner composed of triple cooling water circulation and double heat exchangers to reduce the clean room temperature variation. And the same analysis as above was followed. As he results, it was considered that it was important to increase the number of cooling water circulation for controlling the clean room temperature variation minutely, and this system realized to make the clean room temperature variation less than about ±0.01 degree.

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