The challenge to MOCVD for an InGaN LED
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- MATSUMOTO Koh
- Taiyo Nippon Sanso Corp
Bibliographic Information
- Other Title
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- InGaN LED用MOCVDの課題
- InGaN LED用MOCVDの課題 : 基板材料とコストダウン戦略
- InGaN LEDヨウ MOCVD ノ カダイ : キバン ザイリョウ ト コストダウン センリャク
- A strategy for reducing the cost with substrate materials
- 基板材料とコストダウン戦略
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Abstract
<p>Continuing cost reduction methods for epitaxial growth of the LED structure by MOCVD is discussed for the deployment of LEDs in solid state lighting. The epitaxial cost on a sapphire, silicon and bulk GaN substrate is compared. Lumen production per year per MOCVD machine is highlighted to be as important as the unit area epitaxial cost. The challenges to a production MOCVD tool are also shown.</p>
Journal
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- Oyo Buturi
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Oyo Buturi 82 (10), 858-861, 2013-10-10
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390282752332377472
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- NII Article ID
- 10031199919
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- NII Book ID
- AN00026679
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- ISSN
- 21882290
- 03698009
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- NDL BIB ID
- 024932417
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- CiNii Articles
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- Abstract License Flag
- Disallowed