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Analysis of the amount of gas passing through hole by diffusion
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- Inomata Jun
- FUKUDA CO.,LTD.
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- Hojo Tutomu
- FUKUDA CO.,LTD.
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- Hara Tsutomu
- FUKUDA CO.,LTD.
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- Hirata Mao
- FUKUDA CO.,LTD.
Bibliographic Information
- Other Title
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- 孔を拡散により通過する気体量の解析
Description
<p>We have a problem that the surrounding oxygen and water vapor leak through defective pinhole(s) of a sealed package. If the gases on both sides of the package wall are equal in total pressure but there is a difference between the gas concentrations, diffusion causes gas movement. We analytically determine the amount of gas diffusion passing through each of the two models of a shallow hole and a deep hole, and compose these models to obtain a gas diffusion.We report the derivation of the equation for calculating the amount of gas diffusion in a cylindrical hole having a predetermined depth.</p>
Journal
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- Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
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Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2019 (0), 3Fp11-, 2019
The Japan Society of Vacuum and Surface Science
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Details 詳細情報について
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- CRID
- 1390282752353060736
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- NII Article ID
- 130007737752
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- ISSN
- 24348589
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed