3J3-4 高結合ZnO/水晶構造デバイスにおける温度特性改良(圧電デバイス)
書誌事項
- タイトル別名
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- 3J3-4 The improvement of temperature characteristics for highly coupled ZnO/Quartz structure(Piezoelectric Devices)
抄録
Recent years, several applications require radio frequency filters which have narrow bandwidth with high attenuation. ZnO film/quartz structure has a good potential to satisfy those requirements. This paper shows the optimization of ZnO/quartz structure to obtain nearly zero temperature coefficient of frequency (TCF)with maximizing electro-mechanical coupling coefficient (k^2). In the former papers which one of the authors reported about ZnO/quartz structure, nearly zero TCF with small electro-mechanical coupling coefficient, or maximized k^2 with non-zero TCF was reported. However, both zero TCF and maximized k^2 have not been simultaneously obtained. The authors estimate the optimized structure by calculation and confirm it by measurement also.
収録刊行物
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- 超音波エレクトロニクスの基礎と応用に関するシンポジウム講演論文集
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超音波エレクトロニクスの基礎と応用に関するシンポジウム講演論文集 30 (0), 601-602, 2009-11-18
特定非営利活動法人 超音波エレクトロニクス協会
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詳細情報 詳細情報について
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- CRID
- 1390282763070811904
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- NII論文ID
- 110007721860
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- ISSN
- 24331910
- 13488236
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可