The Design and Development of Inch Worm Type Micro Positioning Stage with X-Z Moving Mechanism including Piezo Actuators

DOI Web Site
  • TSUTSUMI Hirotaka
    National Institute of Technology, Tokyo College, Department of mechanical engineering
  • KAMISHIMA Yuko
    National Institute of Technology, Tokyo College currently Nagoya University

Bibliographic Information

Other Title
  • X-Z駆動機構を用いたインチワーム式ピエゾステージの開発
  • X-Z クドウ キコウ オ モチイタ インチワームシキ ピエゾステージ ノ カイハツ

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Description

<p>  Inch worm mechanism using piezoelectric actuators is one of the driving mechanisms for precision positioning devices or stages, because high precision and long stroke motion can be achieved simultaneously, and the motion is smooth without backlash. However, one of the problems of conventional inch worm mechanisms is that it cannot hold large load on the guide rail. A new inch worm mechanism proposed in this study utilized linear ball guide and four micro X-Z positioning units with eight piezoelectric elements to solve this problem. Motion characteristics of the proposed mechanism were evaluated by various driving voltage wave patterns.</p>

Journal

  • Micromechatronics

    Micromechatronics 62 (218), 23-30, 2018-06-15

    The Horological Institute of Japan

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