Development of a Millimeter-Stroke Electrothermal Kirigami MEMS Actuator with Low Driving Power-Static and Dynamic Thermomechanical Characteristic of Film Bimorph-

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  • Hashimoto Masaaki
    School of Integrated Design Engineering, Keio University, Research Fellow of Japan Society for the Promotion of Science
  • Taguchi Yoshihiro
    Department of System Design Engineering, Keio University

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Other Title
  • ミリ長ストローク・低電力熱駆動切り紙MEMSアクチュエータの開発―薄膜バイモルフの熱・機械応答特性―
  • ミリチョウ ストローク ・ テイデンリョク ネツ クドウ キリガミ MEMS アクチュエータ ノ カイハツ : ハクマク バイモルフ ノ ネツ ・ キカイ オウトウ トクセイ

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<p>This paper presents a millimeter-stroke electrothermal kirigami MEMS actuator with low driving power for endoscopic applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising approach for engineering out-of-plane film structures. Based on the concept of a thermal bimorph kirigami film being folded by the thermal expansion difference, the proposed MEMS actuator is electrothermally transformed into an out-of-plane step structure. Two types of kirigami actuators, multistep and single-step actuator, were successfully fabricated by MEMS processes. The single step actuator with 2 mm film diameter provided a 0.2 mm vertical displacement at 131 mW, and the multistep actuator with 4 mm film diameter achieved a larger 1.1 mm actuation at only 128 mW.</p>

Journal

  • Netsu Bussei

    Netsu Bussei 34 (4), 109-116, 2020

    JAPAN SOCIETY OF THERMOPHYSICAL PROPERTIES

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