Nano-scale Surface and Interface Analysis Using X-ray Spectromicroscopy Assisted by Measurement Informatics

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  • NAGAMURA Naoka
    RCAMC, National Institute for Materials Science PRESTO, JST Graduate School of Advanced Engineering, Tokyo University of Science
  • MATSUMURA Tarojiro
    CD-FMat, National Institute of Industrial Science and Technology
  • NAGATA Kenji
    MaDIS, National Institute for Materials Science
  • AKAHO Shotaro
    HIIRI, National Institute of Industrial Science and Technology
  • ANDO Yasunobu
    CD-FMat, National Institute of Industrial Science and Technology

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Other Title
  • 計測インフォマティクスを応用したX線顕微分光によるナノ表界面分析
  • ケイソク インフォマティクス オ オウヨウ シタ Xセンケンビブンコウ ニ ヨル ナノヒョウ カイメン ブンセキ

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Abstract

<p>Informatics techniques support improving the efficiency of data analysis in spectral imaging measurements. Applications of informatics to the measurement technique are categorized as the measurement informatics, which is growing parallel alongside with materials informatics. Recently, we introduced a spectrum-adapted expectation-maximization (EM) algorithm for high-throughput analysis of a large number of spectral datasets obtained by synchrotron soft X-ray scanning photoelectron microscopy. The advantage of the proposed method is that high-speed peak fitting can be performed with stable behavior of calculation compared to previous methods. We performed the proposed method to the series of spectra collected from graphene field-effect transistors devices. The calculation completed in less than 10 minute per set and successfully detected systematic peak shifts of the C 1s core level spectra in graphene. In contrast, the calculation time was 1day when manually performing the peak fitting by using a nonlinear least-squares method with commercial software. Moreover, we improve the spectrum-adapted EM algorithm by adopting Expectation–Conditional Maximization (ECM) algorithm to use various fitting functions and background functions. This method enables us to conduct the high-through put analysis of peak shift using various fitting functions.</p>

Journal

  • Vacuum and Surface Science

    Vacuum and Surface Science 64 (8), 382-389, 2021-08-10

    The Japan Society of Vacuum and Surface Science

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