書誌事項
- タイトル別名
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- ITO/AgPd/ITO Laminated Films for High-performance Transparent Thin Film Heaters
- ITO/AgPd/ITO セキソウマク オ モチイタ コウセイノウ トウメイ ハクマク ヒーター ノ カイハツ
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抄録
<p>We successfully fabricated the high-performance transparent thin film heaters using ITO/AgPd/ITO laminated films with various thickness combinations and investigated their optical, electrical, structural and heating properties in detail. The surface temperature rise rate (TRR) from 0 to 7 seconds for the ITO (200 nm)/AgPd (10 nm)/ITO (200 nm) under the applied voltage of 6.0 V was 16℃/s, where the temperature reached over 300℃ within 20 sec. The transmittance at 550 nm of this heater was 81%, where the sheet resistance was 4.2 Ω/□. The cross-sectional HREM analyses revealed that the bottom and top ITO films showed quite different polycrystalline structures after the temperature rising tests, which can be explained by the solid-phase and vapor-phase crystallizations, respectively.</p>
収録刊行物
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- 表面と真空
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表面と真空 65 (2), 84-89, 2022-02-10
公益社団法人 日本表面真空学会
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キーワード
詳細情報 詳細情報について
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- CRID
- 1390291115021660544
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- NII論文ID
- 130008159245
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- NII書誌ID
- AA12808657
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- ISSN
- 24335843
- 24335835
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- NDL書誌ID
- 031996833
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可