MOVPE Growth of AlN on Annealed Sputtered AlN Templates with Nano Pattern
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- Iba Yukino
- Grad. Sch. of Eng. Mie Univ.
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- Shojiki Kanako
- Grad. Sch. of Eng. Mie Univ.
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- Kuboya Shigeyuki
- SPORR Mie Univ.
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- Uesugi Kenjiro
- SPORR Mie Univ.
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- Xiao Shiyu
- Grad. Sch. of RIS Mie Univ.
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- Miyake Hideto
- Grad. Sch. of Eng. Mie Univ. Grad. Sch. of RIS Mie Univ.
Bibliographic Information
- Other Title
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- ナノパターンを有するスパッタ・アニール法AlNテンプレート上へのAlNのMOVPE成長
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.2 (0), 2098-2098, 2020-08-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390291932663569024
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC