Probe Diameter Correction Gauge for Micro-CMM Using Fabry-Perot Interferometer

DOI Web Site
  • INOUE Tokio
    Department of Precision Engineering, The University of Tokyo
  • KATO Chisato
    Department of Precision Engineering, The University of Tokyo
  • KADOYA Shotaro
    Research Center for Advanced Science and Technology, The University of Tokyo
  • MICHIHATA Masaki
    Department of Precision Engineering, The University of Tokyo
  • TAKAHASHI Satoru
    Department of Precision Engineering, The University of Tokyo

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Other Title
  • -High-precision distance measurement of two surface-

Abstract

<p>The purpose of this study is to fabricate a Fabry-Perot interferometer to measure the distance between two planes and to measure the amount of correction to produce a highly accurate gauge. In this paper, we propose to use the resonance wavelength of the far mode number to calculate the distance, and evaluate it by measurements using an infrared laser. The effect of temperature change on the resonance wavelength and the measurement distance is also discussed.</p>

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