Epitaxial growth of Al<sub>1-x</sub>Sc<sub>x</sub>N thin films on Si substrates using TiN buffer layer
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- Miyaji Kohei
- Osaka Pref. Univ.
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- Murase Mikio
- Osaka Pref. Univ.
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- Yoshimura Takeshi
- Osaka Pref. Univ.
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- Fujimura Norifumi
- Osaka Pref. Univ.
Bibliographic Information
- Other Title
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- TiNバッファ層を用いたSi基板上へのAl<sub>1-x</sub>Sc<sub>x</sub>N薄膜のエピタキシャル成長
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.1 (0), 1189-1189, 2021-02-26
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390292472549082240
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC