Defect control of Y<sub>2</sub>O<sub>3</sub>-based SiGe MOS interfaces properties
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- Lee Tsung-En
- Univ. of Tokyo
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- Toprasertpong Kasidit
- Univ. of Tokyo
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- Takenaka Mitsuru
- Univ. of Tokyo
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- Takagi Shinichi
- Univ. of Tokyo
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.1 (0), 2276-2276, 2021-02-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390292472549373952
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- ISSN
- 24367613
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- Text Lang
- en
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- Data Source
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- JaLC