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Effect of recoil-implanted N atoms on defect formation in Mg-implanted GaN
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- Herbert Kai C
- Kwansei Gakuin Univ.
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- Shibata Kazuki
- Kwansei Gakuin Univ.
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- Asubar Joel
- Univ. of Fukui
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- Kuzuhara Masaaki
- Kwansei Gakuin Univ.
Bibliographic Information
- Other Title
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- GaNへのMgイオン注入におけるリコイルN原子の影響
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.1 (0), 2412-2412, 2021-02-26
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390292472549398144
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC