Preparation of Y doped HZO ferroelectric thick films at room temperature by the sputtering method and their electrical and piezoelectric properties
-
- Shimura Reijiro
- Tokyo Tech. SMCT
-
- Mimura Takanori
- Tokyo Tech. SMCT
-
- Tateyama Akinori
- Tokyo Tech. SMCT
-
- Shimizu Takao
- Tokyo Tech. SMCT NIMS
-
- Shiraishi Takahisa
- Tokyo Tech. SMCT
-
- Funakubo Hiroshi
- Tokyo Tech. SMCT
Bibliographic Information
- Other Title
-
- スパッタリング法によるY-HZO強誘電体厚膜の室温製膜とその電気特性および圧電特性評価
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2021.1 (0), 1191-1191, 2021-02-26
The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1390292472565298304
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC